HNU-EBL software is being developed by Professor Jie Liu’s team at Hunan University (HNU), for simulation and optimization of electron beam lithography (EBL). The EBL-related experimental research and verification are being carried out by Professor HuiGao Duan, Associate Professor Jian Zhou, Assistant Professor Yiqin Chen at Hunan University.
1）HNU-EBL software R&D team (https://grzy.hnu.edu.cn/site/index/liujie4)：
2）HNU-EBL experimental verification team (http://grjl.hnu.edu.cn/p/5CDB8774DF5FC3E0968B1F53A18BE64B):
