HNU-EBL (V2.0)

The following paragraphs provides: (1) HNU-EBL manual; (2) videos to demonstrate some functionalities of the HNU-EBL (V2.0).

1) HNU-EBL (V2.0) Manual：

2) HNU-EBL (V2.0) operation video demonstration：

• Create a new project:

• Edit the input layers and materials (Note: HNU-EBL is compatible with resists and substrates with arbitrary material composition):

• Run Monte Carlo (MC) simulations to obtain the point spread function (PSF):

• Run proximity effect correction (PEC) by using the calculated PSF, and store the PEC results in a GDSII file:

• PEC calculation process based on supercomputing platform：

• Energy deposition calculation and visualization：

• Developing computation and visualization：

HNU-EBL (V1.0)

The following paragraphs provides: (1) HNU-EBL manual; (2) HNU-EBL user guide; and (3) videos to demonstrate some functionalities of the HNU-EBL (V1.0).

1) HNU-EBL (V1.0) Manual：

2) HNU-EBL (V1.0) User Guide：

3) HNU-EBL (V1.0) operation video demonstration：

• Create a new project:

• Edit the input layers and materials (Note: HNU-EBL is compatible with resists and substrates with arbitrary material composition):

• Run Monte Carlo (MC) simulations to obtain the point spread function (PSF):

• Run proximity effect correction (PEC) by using the calculated PSF, and store the PEC results in a GDSII file:

• Use post-PEC electron dose distribution to compute the energy deposition, then visualize it:

• Inspect the edge placement error (EPE):